10 December 2016 Issue 44

Microwave imaging at the nanoscale

This article examines a novel high frequency electrical characterisation microscope.

DOI: 10.22443/rms.inf.1.145

This high frequency microscope is for the nano-scale imaging of semiconductor devices, advanced materials and biological samples.

The scanning microwave microscopes (SMM) can extract quantitative material properties at GHz frequencies with nanometre accuracy.



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Ferry Kienberger

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